Cristin-resultat-ID: 1250286
Sist endret: 16. februar 2016, 10:36
NVI-rapporteringsår: 2015
Resultat
Vitenskapelig artikkel
2015

On the shape of n-type Czochralski silicon top ingots

Bidragsytere:
  • Guilherme Manuel Morais Gaspar
  • Mari Juel
  • Rune Søndenå
  • Soraia Sofia Pascoa
  • Marisa Di Sabatino
  • Lars Arnberg
  • mfl.

Tidsskrift

Journal of Crystal Growth
ISSN 0022-0248
e-ISSN 1873-5002
NVI-nivå 1

Om resultatet

Vitenskapelig artikkel
Publiseringsår: 2015
Volum: 418
Sider: 176 - 184

Importkilder

Scopus-ID: 2-s2.0-84924649810

Beskrivelse Beskrivelse

Tittel

On the shape of n-type Czochralski silicon top ingots

Sammendrag

Industrial scale n-type monocrystalline silicon ingots with different crown shape and shouldering area have been grown and characterized in terms of minority carrier lifetime, resistivity and concentration and distribution of interstitial oxygen (Oi), voids and thermal donors (TD). The properties have been correlated with the process parameters. The results indicate that there is a relationship between the top ingot shape and the corresponding minority carrier lifetime quality of the first part of the ingot body. Oxygen incorporation is directly correlated to the time that the melt free surface is in contact with the purged gas atmosphere as well as the temperature of the melt. The relative P-band position is dependent on the process parameters at the early part of the ingot and the corresponding oxide particles could be included on the first wafers obtained from the ingot. The results also show that the early body quality is not always improved after TD annealing. This suggests that not all types and sizes of TD are dissolved during standard annealing processes. Other types of oxygen-related defects are most likely present and contribute to the lowered minority carrier lifetime found at this region. Both higher oxygen and vacancy concentration contribute to the formation of these defects.

Bidragsytere

Guilherme Manuel Morais Gaspar

  • Tilknyttet:
    Forfatter
    ved Institutt for materialteknologi ved Norges teknisk-naturvitenskapelige universitet

Mari Juel

  • Tilknyttet:
    Forfatter
    ved Bærekraftig energiteknologi ved SINTEF AS

Rune Søndenå

  • Tilknyttet:
    Forfatter
    ved Solenergi ved Institutt for energiteknikk

Soraia Sofia Pascoa

  • Tilknyttet:
    Forfatter
    ved Institutt for materialteknologi ved Norges teknisk-naturvitenskapelige universitet

Marisa Di Sabatino Lundberg

Bidragsyterens navn vises på dette resultatet som Marisa Di Sabatino
  • Tilknyttet:
    Forfatter
    ved Institutt for materialteknologi ved Norges teknisk-naturvitenskapelige universitet
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