Cristin-resultat-ID: 1274567
Sist endret: 24. september 2015, 22:10
Resultat
Vitenskapelig foredrag
2008

Piezoelectric Microsystems for Industry

Bidragsytere:
  • Frode Tyholdt
  • Niels Peter Østbø
  • Andreas Vogl og
  • Erik Poppe

Presentasjon

Navn på arrangementet: Nanotech Northern Europe 2008
Sted: Copenhagen, Denmark
Dato fra: 23. september 2008
Dato til: 25. september 2008

Arrangør:

Arrangørnavn: Spinverse Ltd

Om resultatet

Vitenskapelig foredrag
Publiseringsår: 2008

Importkilder

SINTEF AS-ID: S8265

Beskrivelse Beskrivelse

Tittel

Piezoelectric Microsystems for Industry

Sammendrag

Reliable integration of piezoelectric thin films into silicon-based microsystems on an industrial scale is a key enabling technology for a wide range of future products. However, the availability of high performance piezoelectric thin films is low and current knowledge in the field is mostly limited to the conditions and scale of academic laboratories. To enhance industrial take-up new industrial standards had to be developed [1]. The aim of the present study has been to demonstrate the capability of an established piezo-MEMS process for fabrication of prototypes and proof-of-principle designs in order to investigate the feasibility of such devices for industry. A multi-project wafer design based on SOI technology containing 5 different components; ultrasonic transducer arrays, accelerometers, ultrasonic microphones and acoustic gas sensors comprising of around 1000 membranes and cantilevers, was made to test the feasibility of piezo-MEMS technology. The design room was further expanded by bonding some of the finished devices to patterned glass wafers, at wafer level, before dicing. The active piezoelectric material was a 2 μm thin film of lead zirconate titanate (PZT) deposited by a state-ofthe-art chemical solution deposition (CSD) procedure providing an effective transversal piezoelectric coefficient of -15 C/m2 [2]. Subject to a non-disclosure agreement, a design handbook is available on request, see www.microbuilder.org 1. H. Raeder, F. Tyholdt, W. Booij, F. Calame, N. P. Ostbo, R. Bredesen, K. Prume, G. Rijnders, and P. Muralt, Journal of Electroceramics, 19, 357 (2007). 2. F. Tyholdt, F. Calame, K. Prume, H. Ræder, and P. Muralt, Journal of Electroceramics, 19, 311 (2007). 3. NORD-pie, Piezoelectric Microsystems for Industry in the Nordic Countries, Nordic Innovation Centre (MINT-06072) (www.sintef.no/nord-pie)

Bidragsytere

Frode Tyholdt

  • Tilknyttet:
    Forfatter
    ved Microsystems and Nanotechnology ved SINTEF AS

Niels Peter Østbø

  • Tilknyttet:
    Forfatter
    ved Materialer og nanoteknologi ved SINTEF AS

Andreas Vogl

  • Tilknyttet:
    Forfatter
    ved Materialer og nanoteknologi ved SINTEF AS

Erik Utne Poppe

Bidragsyterens navn vises på dette resultatet som Erik Poppe
  • Tilknyttet:
    Forfatter
    ved Materialer og nanoteknologi ved SINTEF AS
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