Cristin-resultat-ID: 146911
Sist endret: 5. september 2014, 10:35
Resultat
Vitenskapelig foredrag
2001

Protection of MOS Capacitors during Anodic Bonding

Bidragsytere:
  • Kari Schjølberg-Henriksen
  • Jose Antonio Plaza
  • Joan Marc Rafí
  • Jaume Esteve
  • Francesca Campabadal
  • Joaquín Santander
  • mfl.

Presentasjon

Navn på arrangementet: MME Europe 12th Micromechanics Europe Workshop
Sted: Cork, Ireland
Dato fra: 16. september 2001

Om resultatet

Vitenskapelig foredrag
Publiseringsår: 2001

Importkilder

ForskDok-ID: 62451

Beskrivelse Beskrivelse

Tittel

Protection of MOS Capacitors during Anodic Bonding

Sammendrag

When packaging monolithic sensors by anodic bonding, protection of the electronics is crucial. We have investigated two different methods for protecting MOS capacitors from damage during anodic bonding. Our first approach was to etch 50 µm deep cavities in the Pyrex glass, lowering the electric field across the cavity during bonding. The second protection method was to coat the inside of a 10 µm deep Pyrex cavity with aluminium, forming a Faraday cage during anodic bonding. With both methods, we obtained unchanged CV curves when measuring the capacitors after bonding. In comparison, unprotected capacitors situated in a 10 µm deep Pyrex cavity exhibited increased leakage current after anodic bonding.

Bidragsytere

Kari Schjølberg-Henriksen

  • Tilknyttet:
    Forfatter
    ved Smart Sensors and Microsystems ved SINTEF AS

Jose Antonio Plaza

  • Tilknyttet:
    Forfatter

Joan Marc Rafí

  • Tilknyttet:
    Forfatter

Jaume Esteve

  • Tilknyttet:
    Forfatter

Francesca Campabadal

  • Tilknyttet:
    Forfatter
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