Cristin-resultat-ID: 1272347
Sist endret: 24. september 2015, 20:28
Resultat
Vitenskapelig foredrag
2010

SINTEF moveMEMS – a standard process for piezoelectric microsystems prototyping

Bidragsytere:
  • Frode Tyholdt
  • Thor Bakke
  • Andreas Vogl
  • Erik Poppe
  • Hannah Rosquist Tofteberg
  • Niels Peter Østbø
  • mfl.

Presentasjon

Navn på arrangementet: Electroceramics XII
Sted: Trondheim
Dato fra: 13. juni 2010
Dato til: 16. juni 2010

Arrangør:

Arrangørnavn: NTNU

Om resultatet

Vitenskapelig foredrag
Publiseringsår: 2010

Importkilder

SINTEF AS-ID: S15902

Beskrivelse Beskrivelse

Tittel

SINTEF moveMEMS – a standard process for piezoelectric microsystems prototyping

Sammendrag

Micro electro-mechanical systems (MEMS) with integrated piezoelectric thin films (piezoMEMS) have displayed particular versatility in terms of new possible application areas. However, the prototyping costs and needed competence for industries that would like to exploit this new technology can be both unaffordable and hard to establish. The SINTEF moveMEMS process is an open standardized process for fabrication of piezoMEMS. The availability of high-performance PZT (Pb(Zr,Ti)O3) thin-films ready for integration in MEMS processes opens up these new application areas for industry.   Effective long stroke actuation of MEMS structures has been an issue for many years. Indeed, in many optical applications long-stroke/large angle actuation is essential, such as mirrors for FTIR or Fabry-Perot interferometers. PiezoMEMS technology delivers long-stroke actuation at low voltages combined with low power consumption. Stroke lengths of several tens of µm have been demonstrated for piezoelectric MEMS cantilevers at voltages

Bidragsytere

Frode Tyholdt

  • Tilknyttet:
    Forfatter
    ved Materialer og nanoteknologi ved SINTEF AS

Thor Bakke

  • Tilknyttet:
    Forfatter
    ved Microsystems and Nanotechnology ved SINTEF AS

Andreas Vogl

  • Tilknyttet:
    Forfatter
    ved Microsystems and Nanotechnology ved SINTEF AS

Erik Utne Poppe

Bidragsyterens navn vises på dette resultatet som Erik Poppe
  • Tilknyttet:
    Forfatter
    ved Microsystems and Nanotechnology ved SINTEF AS

Hannah Rosquist Tofteberg

  • Tilknyttet:
    Forfatter
    ved Microsystems and Nanotechnology ved SINTEF AS
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