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Cristin-resultat-ID:
1272525
Sist endret:
24. september 2015, 20:35
Resultat
Vitenskapelig foredrag
2010
MICROSCOPIC NEAR INFRARED (NIR) IMAGING FOR INVESTIGATION OF THE SAW-CHANNEL SURFACE DURING WIRE-SAWING OF SILICON
Lars Johnsen
og
Kay Gastinger
Presentasjon
Presentasjon
Navn på arrangementet: 25th European Photovoltaic Solar Energy Conference and Exhibition
Sted: Valencia
Dato fra:
6. september 2010
Dato til:
10. september 2010
Arrangør:
Arrangørnavn: 24th European Photovoltaic Solar Energy Conference and Exhibition
Om resultatet
Om resultatet
Vitenskapelig foredrag
Publiseringsår: 2010
Open Access
Importkilder
Importkilder
SINTEF AS-ID: S17303
Beskrivelse
Beskrivelse
Engelsk
Tittel
MICROSCOPIC NEAR INFRARED (NIR) IMAGING FOR INVESTIGATION OF THE SAW-CHANNEL SURFACE DURING WIRE-SAWING OF SILICON
Sammendrag
A setup for high resolution video recording of the chipping process during slurry based sawing of silicon is introduced. The setup allows in situ imaging of the chipping process in silicon (Si) by operating in the near infrared region where Si is transparent. Extended resolution is achieved through the use of a silicon lens as sample for the sawing. By sawing in the lens perfect immersion optics are implemented resulting in an imaging system with very high numerical aperture. The sample is illuminated by a halogen lamp through a beam splitter cube. An InGaAs camera with VGA resolution is used for video capturing. The paper presents a work in progress. Results from experiments with an x,y,z-controlled single indenter as well as indents from silicon carbide (SiC) particles trapped between the saw wire and the Si surface are presented. Image sequences of the dynamic development of the indent process and the consecutive chipping are presented.
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fullstendig beskrivelse
Bidragsytere
Bidragsytere
Lars Johnsen
Forfatter
ved Smart Sensors and Microsystems ved SINTEF AS
Kay Gastinger
Forfatter
ved Smart Sensors and Microsystems ved SINTEF AS
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