Electrode configurations for layered-plate piezoelectric micro-actuators

Piezoelectric micro-actuators have been employed in different microsystems such as micro-pumps, ultrasonic devices, and the tunable lens. A common feature of these applications is the construction of a laminated diaphragm micro-actuator. The electromechanical coupling inside the piezoelectric layers depend on electrode configuration. Two conventional electrode arrangements are commonly exploited are the top-bottom and the interdigital electrodes. In this study, expanding on the two conventional electrode designs, others electrode configurations (interdigital, spirals, radial electrodes) for the piezoelectric micro-actuators are investigated. We focus on the effects of the different electrode configurations on the piezoelectric micro-actuators’ bending. Using the finite element method, a comparison of the micro-actuators driven by different electrode arrangements, all with the same electric field–strength, is made.