Equivalent-circuit models for electret-based vibration energy harvesters

This paper presents a complete analysis to build a tool for modelling electret-based vibration energy harvesters. The calculational approach includes all possible effects of fringing fields that may have significant impact on output power. The transducer configuration consists of two sets of metal strip electrodes on a top substrate that faces electret strips deposited on a bottom movable substrate functioning as a proof mass. Charge distribution on each metal strip is expressed by series expansion using Chebyshev polynomials multiplied by a reciprocal square-root form. The Galerkin method is then applied to extract all charge induction coefficients. The approach is validated by finite element calculations. From the analytic tool, a variety of connection schemes for power extraction in slot-effect and cross-wafer configurations can be lumped to a standard equivalent circuit with inclusion of parasitic capacitance. Fast calculation of the coefficients is also obtained by a proposed closed-form solution based on leading terms of the series expansions. The achieved analytical result is an important step for further optimisation of the transducer geometry and maximising harvester performance.