Sammendrag
In recent decades, Lab on a chip technology has become a popular research field due to its future prospects in point of care treatment. There has been rising interest in the development of the optical waveguide based biophotonic sensors. Optical waveguide sensors have various advantages including high sensitivity, small size and low cost. Our approach is to develop a SOI based biophotonic sensor using amorphous silicon. At present a lot of optical waveguide sensors are available that are based on crystalline silicon as processing involved in crystalline are well developed due to advancements in IC and MEMS industries. But the fabrication of SOI platform using crystalline silicon is a very expensive process. On the other hand, deposition of amorphous silicon can be easily done and it is also cost effective. So, we designed and fabricated optical waveguide based on amorphous silicon.
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