Cristin-resultat-ID: 1650518
Sist endret: 4. januar 2019 14:18
Resultat
Vitenskapelig foredrag
2017

Piezoelectric MEMS development in SINTEF

Bidragsytere:
  • Frode Tyholdt
  • Runar Plunnecke Dahl-Hansen
  • Andreas Vogl
  • Thor Bakke
  • Per Martin Rørvik og
  • Fabrice Lapique

Presentasjon

Navn på arrangementet: Piezo 2017 - Electroceramics for End-Users IX
Sted: Cercedilla, Madrid
Dato fra: 19. februar 2017
Dato til: 22. februar 2017

Om resultatet

Vitenskapelig foredrag
Publiseringsår: 2017

Beskrivelse Beskrivelse

Tittel

Piezoelectric MEMS development in SINTEF

Sammendrag

SINTEF is an independent research institute that has experience with making piezoMEMS devices since 2002. Our competences cover the whole process from idea and design, through materials development and process integration to device fabrication to packaging. SINTEF develops piezoMEMS in-house and in collaboration with our customers and partners but also has a key strategy to be a developer of new devices (www.piezomicrosystems.com). SINTEF has a proven track record of successful concepts, devices and projects like e.g. the T-Lens currently being commercialized by poLight (www.polight.com) and the StreetHopper by Polewall (www.polewall.com). A key to success in piezoMEMS has been to both have deep material and MEMS competence that has resulted in successful PZT and MEMS process integration. The SINTEF labs are also very flexible compared to a production foundry and is thus ideal for development and testing of new materials and processes. The continuing research in material science and fabrication processes at SINTEF ensures continued development of state-of-the-art technology. This is done in collaboration projects like the H2020 program. Recently started developments include thin films of lead-free KNN and relaxor materials such as PMN-PT. SINTEF has two commercial PZT deposition tools based on PLD (pulsed laser deposition) and CSD (chemical solution deposition) and is hence well equipped for deposition of thin film piezoelectrics and other functional materials up to 200 mm wafers.

Bidragsytere

Frode Tyholdt

  • Tilknyttet:
    Forfatter
    ved Microsystems and Nanotechnology ved SINTEF AS

Runar Plunnecke Dahl-Hansen

  • Tilknyttet:
    Forfatter
    ved Institutt for elektroniske systemer ved Norges teknisk-naturvitenskapelige universitet

Andreas Vogl

  • Tilknyttet:
    Forfatter
    ved Microsystems and Nanotechnology ved SINTEF AS

Thor Bakke

  • Tilknyttet:
    Forfatter
    ved Microsystems and Nanotechnology ved SINTEF AS
Aktiv cristin-person

Per Martin Rørvik

  • Tilknyttet:
    Forfatter
    ved Bærekraftig energiteknologi ved SINTEF AS
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