PiezoMEMS in Realistic Environments

Highly planarized PbZr0.48Ti0.52O3(PZT)-based piezoelectric micropistons (PIMPs) were fabricated at SINTEF MiNaLab using chemical solution deposited (CSD) and pulsed laser deposited (PLD) PZT. Both CSD and PLD-based devices were actuated at 20V peak-to-peak sine wave with a frequency of 1.9kHz in humid N2-atmosphere for ambient temperature between 25oC and 100oC and device temperature from 25oC to 100oC. Here we present initial studies on lifetime and possible failure mechanisms for PLD-based devices with and without Al2O3-passivation when actuated in realistic operating conditions.