Cristin-resultat-ID: 1722298
Sist endret: 11. november 2019 09:53
NVI-rapporteringsår: 2019
Resultat
Vitenskapelig artikkel
2019

(111)Si thin layers detachment by stress-induced spallation

Bidragsytere:
  • Najoua Zayyoun
  • Timothee Pingault
  • Esidor Ntsoenzok
  • Larbi Laanab
  • Alexander Ulyashin
  • Amin S. Azar
  • mfl.

Tidsskrift

Surface Topography: Metrology and Properties
ISSN 2051-672X
e-ISSN 2051-672X
NVI-nivå 1

Om resultatet

Vitenskapelig artikkel
Publiseringsår: 2019
Volum: 7
Hefte: 1

Importkilder

Scopus-ID: 2-s2.0-85067824381

Beskrivelse Beskrivelse

Tittel

(111)Si thin layers detachment by stress-induced spallation

Sammendrag

In this work, results of controlled detachment of (111) silicon by stress induced spalling (SIS) process, which is based on a gluing on a metallic stressor layer by an epoxy adhesive on top of a silicon substrate, are presented. It is shown that silicon foils mainly (1  ×  1) cm2 with different thicknesses (~50–170 µm) can be successfully detached using different materials (steel, copper, aluminum, nickel and titanium) as stressor layers with thicknesses ~50–500 µm. Such detachment can be realized by dipping of a stressor/glue/silicon wafer based structure into liquid nitrogen. As a result, Si foils with different thicknesses from ~50 µm to ~170 µm can be detached. An analytical and numerical approaches based on principles of linear elastic fracture mechanics is developed and they are shown that such approaches can predict general trends and conditions for the detachment of silicon foils with desired thicknesses using a stressor layer. Raman spectroscopy analysis of the residual stresses in detached silicon foils shows, that tensile stresses (up to  −36 MPa) as well as higher value compressive stresses (up to ~444 MPa) are present in such foils. Moreover, optical and scanning electron microscopy (SEM) measurements show that surface of the detached foils exhibits some periodic lines originated by stresses.

Bidragsytere

Najoua Zayyoun

  • Tilknyttet:
    Forfatter
    ved Frankrike
  • Tilknyttet:
    Forfatter
    ved Jâmiât Mohammed El Khâmiss Rabat (Rabat-Chellah)

Timothee Pingault

  • Tilknyttet:
    Forfatter
    ved Frankrike

Esidor Ntsoenzok

  • Tilknyttet:
    Forfatter
    ved Frankrike
  • Tilknyttet:
    Forfatter
    ved Université d'Orléans

Larbi Laanab

  • Tilknyttet:
    Forfatter
    ved Jâmiât Mohammed El Khâmiss Rabat (Rabat-Chellah)

Alexsander G. Ulyashin

Bidragsyterens navn vises på dette resultatet som Alexander Ulyashin
  • Tilknyttet:
    Forfatter
    ved Metallproduksjon og prosessering ved SINTEF AS
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