Sammendrag
Self organized nanostructures open up for efficient and low-cost production of materials with new and interesting properties, with applications in electronics, optics and life sciences. A major challenge for controlling and understanding growth processes of such structures is the characterization of nanometer sized structures. Low energy ion sputtering of GaSb with oblique ion incidence results in densely packed inclined nanopillars, pointing in the direction of ion incidence. We demonstrate that ellipsometry can be used as a non-destructive tool to characterize such structures, with possibilities for in situ use. The optical response of the structures is highly anisotropic, requiring the use of generalized ellipsometry or Mueller matrix ellipsometry.
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